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Influence of sputtering conditions on the optical and electrical properties of laser-annealed and wet-etched room temperature sputtered ZnO:Al thin films

Boukhicha, Rym CNRS, LPICM, Ecole Polytechnique, 91128 Palaiseau, France rym.boukhicha@polytechnique.edu; Prod'Homme, Patricia Total S&M — New Energies Division, R&D Division, Department of Solar Energies EN/BO/RD/SOL, Tour Michelet, 24 cours Michelet, La Défense 10, 92069 Paris La Défense Cedex, France; Johnson, Erik CNRS, LPICM, Ecole Polytechnique, 91128 Palaiseau, France; i Cabarrocas, Pere Roca CNRS, LPICM, Ecole Polytechnique, 91128 Palaiseau, France; Charpentier, Coralie CNRS, LPICM, Ecole Polytechnique, 91128 Palaiseau, France Total S&M — New Energies Division, R&D Division, Department of Solar Energies EN/BO/RD/SOL, Tour Michelet, 24 cours Michelet, La Défense 10, 92069 Paris La Défense Cedex, France; Emeraud, Thierry Photovoltaic Business Unit, Excico Group NV, Kempische Steenweg 305/2, B-3500 Hasselt, Belgium; Lerat, Jean-François Photovoltaic Business Unit, Excico Group NV, Kempische Steenweg 305/2, B-3500 Hasselt, Belgium (2015-01-27)

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