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Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering

Tsai, Du-Cheng Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Lin, Sheng-Ru Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Huang, Yen-Lin Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Liang, Shih-Chang Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Shieu, Fuh-Sheng Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan fsshieu@dragon.nchu.edu.tw (2015-01-12)
Sputtering pressure effects on the structural and mechanical properties of TiVCr alloy coatings

Tsai, Du-Cheng Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Jung, De-Ru Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Lin, Sheng-Ru Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Huang, Yen-Lin Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan; Shieu, Fuh-Sheng Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan fsshieu@dragon.nchu.edu.tw (2015-01-13)